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Continue to ChatThe influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition - https://avesis.marmara.edu.tr/yayin/63cfb5cf-2be0-497c-b890-3f3e5adc00c4/the-influence-of-n-2-h-2-and-ammonia-n-source-materials-on-optical-and-structural-properties-of-aln-films-grown-by-plasma-enhanced-atomic-layer-deposition